Near-surface interactions and their etching-reaction model in metal plasma-assisted etching.
| Autor: | Tachi, Shinichi, Izawa, Masaru, Tsujimoto, Kazunori, Kure, Tokuo, Kofuji, Naoyuki, Suzuki, Keizo, Hamasaki, Ryoji, Kojima, Masayuki |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 1, p250-259, 10p |
| Databáze: | Complementary Index |
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