Chemical vapor deposition of diamond films on hydrofluoric acid etched silicon substrates.

Autor: Schelz, S., Borges, C. F. M., Martinu, L., Moisan, M.
Zdroj: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 5, p2743-2749, 7p
Databáze: Complementary Index