Effects of oxygen ion assist at 1-10 eV on growth of Bi2(Sr,Ca)2CuOx films at 540 °C by ion-beam sputtering.

Autor: Endo, T., Yan, H., Abe, K., Nagase, S., Ishida, Y., Nishiku, H.
Zdroj: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 4, p1990-1998, 9p
Databáze: Complementary Index