Artificial neural network exponentially weighted moving average controller for semiconductor processes.
| Autor: | Smith, Taber H., Boning, Duane S. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 3, p1377-1384, 8p |
| Databáze: | Complementary Index |
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