Orientation-dependence of elastic strain energy in hexagonal and cubic boron nitride layers in energetically deposited BN films.
Autor: | Cardinale, G. F., Medlin, D. L., Mirkarimi, P. B., McCarty, K. F., Howitt, D. G. |
---|---|
Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 1, p196-200, 5p |
Databáze: | Complementary Index |
Externí odkaz: |