Aspects of nitrogen surface chemistry relevant to TiN chemical vapor deposition.
| Autor: | Schulberg, Michelle T., Allendorf, Mark D., Outka, Duane A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1996, Vol. 14 Issue 6, p3228-3235, 8p |
| Databáze: | Complementary Index |
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