Measurement of the elastic stress of thin films deposited on gallium arsenide.
| Autor: | Mihailovich, R. E., Koscica, T., Zeto, R. J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1996, Vol. 14 Issue 4, p2483-2487, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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