Mapping of radio frequency plasma potential throughout a particle trapping region using an emissive probe.
| Autor: | Kang, Jungwon, Carlile, Robert N., O'Hanlon, John F., Collins, Sean M. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1996, Vol. 14 Issue 2, p639-643, 5p |
| Databáze: | Complementary Index |
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