Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell.
| Autor: | Collins, S. M., Brown, D. A., O'Hanlon, J. F., Carlile, R. N. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1996, Vol. 14 Issue 2, p634-638, 5p |
| Databáze: | Complementary Index |
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