Defect production and recombination during low-energy ion processing.
| Autor: | Kellerman, B. K., Floro, J. A., Chason, E., Brice, D. K., Picraux, S. T., White, J. M. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1995, Vol. 13 Issue 3, p972-978, 7p |
| Databáze: | Complementary Index |
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