Thermal relaxation kinetics of strained Si/Si1-xGex heterostructures determined by direct measurement of mosaicity and lattice parameter variations.
| Autor: | Sardela, M. R., Hansson, G. V. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1995, Vol. 13 Issue 2, p314-326, 13p |
| Databáze: | Complementary Index |
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