Imaging extrinsic defects at the NiSi2/Si(111) metal-semiconductor interface.

Autor:	Kubby, J. A., Greene, W. J.
Zdroj:	Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1994, Vol. 12 Issue 4, p2009-2016, 8p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu