Comparison of argon electron-cyclotron-resonance plasmas in three magnetic field configurations. II. Energy distribution of argon ions.
| Autor: | Junck, Kevin L., Getty, Ward D. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1994, Vol. 12 Issue 3, p760-768, 9p |
| Databáze: | Complementary Index |
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