Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges.
| Autor: | Petrov, I., Ivanov, I., Orlinov, V., Sundgren, J.-E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1993, Vol. 11 Issue 5, p2733-2741, 9p |
| Databáze: | Complementary Index |
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