Observation of oxygen enrichment in zirconium oxide films @f| .
| Autor: | Khawaja, E. E., Bouamrane, F., Hallak, A. B., Daous, M. A., Salim, M. A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1993, Vol. 11 Issue 3, p580-587, 8p |
| Databáze: | Complementary Index |
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