Low voltage and high speed operating electrostatic wafer chuck.
| Autor: | Nakasuji, Mamoru, Shimizu, Hiroyasu |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1992, Vol. 10 Issue 6, p3573-3578, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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