Variation of the lead content in sputtered copper-lead films due to resputtering effects.
| Autor: | Eisenmenger-Sittner, Christoph, Bergauer, Anton, Wagendristel, Alfred, Gärtner, Walter |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1992, Vol. 10 Issue 5, p3260-3265, 6p |
| Databáze: | Complementary Index |
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