Stress and microhardness in sputter deposited molybdenum and chromium films.
| Autor: | Window, B., Harding, G. L., Horrigan, C., Bell, T. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1992, Vol. 10 Issue 5, p3278-3282, 5p |
| Databáze: | Complementary Index |
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