Plasma-enhanced metalorganic chemical vapor deposition of BaTiO3 films.
| Autor: | Van Buskirk, Peter C., Gardiner, Robin, Kirlin, Peter S., Krupanidhi, Salora |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1992, Vol. 10 Issue 4, p1578-1583, 6p |
| Databáze: | Complementary Index |
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