The influence of ultrathin predeposited platinum layers on the formation of iridium silicide.
| Autor: | Hoffman, D. M., McGinn, J. T., Gilmartin, H., Hewitt, L. R., Lanzillotto, A.-M., Szostak, D. J., Tams, F. J., Thomas, J. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1991, Vol. 9 Issue 3, p456-460, 5p |
| Databáze: | Complementary Index |
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