Magnetron sputtered TiAlON composite thin films. II. Optical and electrical properties.
| Autor: | Luthier, R., Lévy, F. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1991, Vol. 9 Issue 1, p110-115, 6p |
| Databáze: | Complementary Index |
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