Microstructural variations in aluminum oxide coatings deposited using a dual beam ion system.
| Autor: | Panitz, J. K. G., Hills, C. R., Tallant, D. R. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1313-1317, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|