Characterization of electron beam damage in oxidized silicon using thermally stimulated exoelectron emission.
| Autor: | Xiong-Skiba, P., Carroll, D. L., Doering, D. L. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1549-1553, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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