Macroscopic modeling of oxygen plasmas.
| Autor: | Misium, George R. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1642-1647, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Misium, George R. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1642-1647, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|