Etching results and comparison of low pressure electron cyclotron resonance and radio frequency discharge sources.
Autor: | Cook, J. M., Ibbotson, D. E., Foo, P. D., Flamm, D. L. |
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Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1990, Vol. 8 Issue 3, p1820-1824, 5p |
Databáze: | Complementary Index |
Externí odkaz: |