Blazed grating formation in a hollow cathode etcher.
| Autor: | Gross, M., Wu, Y., Horwitz, C. M. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1989, Vol. 7 Issue 6, p3213-3216, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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