Optical emission characterization of a divergent magnetic field electron cyclotron resonance source.
| Autor: | McKillop, John S., Forster, John C., Holber, William M. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1989, Vol. 7 Issue 3, p908-913, 6p |
| Databáze: | Complementary Index |
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