The role of chlorinated surface films in excimer laser etching of Cu at low Cl2 pressures.
| Autor: | Baller, T. S., van Veen, G. N. A., Dieleman, J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1988, Vol. 6 Issue 3, p1409-1413, 5p |
| Databáze: | Complementary Index |
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