Thin solid lubricant film formation by fast atom bombardment sputter deposition.
Autor: | Kuwano, Hiroki, Nagai, Kazutoshi |
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Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1985, Vol. 3 Issue 4, p1809-1812, 4p |
Databáze: | Complementary Index |
Externí odkaz: |