A performance comparison of vacuum deposition monitors employing atomic absorption (AA) and electron impact emission spectroscopy (EIES).
| Autor: | Gogol, C. A., Reagan, S. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1983, Vol. 1 Issue 2, p252-256, 5p |
| Databáze: | Complementary Index |
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