Methylated poly(4-hydroxystyrene): A new resin for deep-ultraviolet resist application.
| Autor: | McKean, Dennis R., Hinsberg, William D., Sauer, Thomas P., Willson, Grant, Vicari, Richard, Gordon, Douglas J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p1466-1469, 4p |
| Databáze: | Complementary Index |
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