Distortion measurement of embedded absorber (silicon membrane) and conventional (diamond membrane) x-ray masks.
| Autor: | Maluf, Nadim I., Pease, R. Fabian W., Windischmann, Henry |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p1584-1588, 5p |
| Databáze: | Complementary Index |
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