High resolution germanium zone plates and apertures for soft x-ray focalometry.
| Autor: | Tennant, D. M., Raab, E. L., Becker, M. M., O'Malley, M. L., Bjorkholm, J. E., Epworth, R. W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p1970-1974, 5p |
| Databáze: | Complementary Index |
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