Free standing silicon microstructures for soft x-ray masks and cold atom focusing.

Autor:	Tennant, D. M., Bjorkholm, J. E., O'Malley, M. L., Becker, M. M., Gregus, J. A., Epworth, R. W.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p1975-1979, 5p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu