A new precise optical autofocus system.
| Autor: | Fein, Michael E., Kelderman, Herman F., Neukermans, Armand P., Loh, Alan E., Wolze, David |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p2017-2022, 6p |
| Databáze: | Complementary Index |
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