A scanning electron microscope for trench observation.
| Autor: | Saito, Kenichi, Yoshizawa, Masahiro, Wada, Kou |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 5, p1152-1157, 6p |
| Databáze: | Complementary Index |
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