Deflection for scanning ion beam systems.
| Autor: | Slingerland, H. N. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 1, p83-85, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Slingerland, H. N. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 1, p83-85, 3p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|