Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices.
| Autor: | Kirk, E. C. G., McMahon, R. A., Cleaver, J. R. A., Ahmed, H. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 6, p1940-1943, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|