Thickness measurement of titanium and titanium silicide films by infrared transmission.
| Autor: | Lee, Jen-Jiang, Lee, Chang-Ou, Ernst, Stephen |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 5, p1533-1536, 4p |
| Databáze: | Complementary Index |
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