Submicron pattern dimension determination using a total waveform comparison method.
| Autor: | Hasegawa, Shinya, Iida, Yasuo, Hidaka, Toshiharu |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 3, p866-870, 5p |
| Databáze: | Complementary Index |
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