Scanning ion beam techniques for the examination of microelectronic devices.
| Autor: | Cleaver, J. R. A., Kirk, E. C. G., Young, R. J., Ahmed, H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 3, p1026-1029, 4p |
| Databáze: | Complementary Index |
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