Summary Abstract: Laser etching and evaporation of CaF2 studied by mass spectrometry.
| Autor: | Estler, R. C., Anderson, J. E., Apel, E. C., Nogar, N. S. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1987, Vol. 5 Issue 5, p1519-1520, 2p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|