Three-dimensional Monte Carlo calculation by a supercomputer.
| Autor: | Hasegawa, Shinya, Iida, Yasuo, Hidaka, Toshiharu |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1987, Vol. 5 Issue 1, p142-145, 4p |
| Databáze: | Complementary Index |
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