High speed precision X-Y stage.
| Autor: | Reeds, John, Hansen, S., Otto, O., Carroll, Allen M., McCarthy, Donald J., Radley, Jack |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1985, Vol. 3 Issue 1, p112-116, 5p |
| Databáze: | Complementary Index |
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