Applications of surface textures produced with natural lithography.

Autor:	Deckman, H. W., Dunsmuir, J. H.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 4, p1109-1112, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu