The step coverage of undoped and phosphorus-doped SiO2 glass films.
| Autor: | Levin, R. M., Evans-Lutterodt, K. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 1, p54-61, 8p |
| Databáze: | Complementary Index |
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