Epitaxial TiN(001) Grown and Analyzed In situ by AES After (1) Deposition and (2) Ar+ Sputter Etching.

Autor: Finnegan, N., Lee, T.-Y., Haasch, R. T., Greene, J. E., Petrov, I.
Zdroj: Surface Science Spectra; 2000, Vol. 7 Issue 3, p213-220, 8p
Databáze: Complementary Index