Silicon interface trap characterization with elastic metal gate metrology.
| Autor: | Kraus, Philip A., Ho, Nhan, Bae, Sang Ho, Olsen, Christopher S. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 5, p2240-2243, 4p |
| Databáze: | Complementary Index |
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