Surface etching of YBCO films by xenon difluoride.
| Autor: | Crossley, Benjamin L., Drehman, Alvin J., Reid, James R., Derov, John S., Corrales, Alfredo A., Crisman, Everett E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 4, p1607-1610, 4p |
| Databáze: | Complementary Index |
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