Lateral templating of self-organized ripple morphologies during focused ion beam milling of Ge.
| Autor: | Ichim, Stefan, Aziz, Michael J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 3, p1068-1071, 4p |
| Databáze: | Complementary Index |
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